工艺流程:
负载→显影→加压水清洗→自来水洗→吸干→冷多风干燥→热风干燥→检验→蚀刻1,2→ 蚀刻3,4→高压冲洗→市水洗→检查→退膜1,2→压力水洗→市水洗→吸干→冷热干→卸载
Process flow:
load → development → pressurized water cleaning → tap water cleaning → suction drying → cold multi air drying → hot air drying → inspection → etching 1,2 → etching 3,4 → high pressure washing → municipal water washing → inspection → film removal 1,2 → pressurized water washing → municipal water washing → suction drying → cold hot drying → unloading |